The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2004
Filed:
Jun. 27, 2002
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A process for manufacturing an electrophotographic photosensitive member is disclosed in which a source gas is decomposed by the use of a high-frequency power in a rector to deposit sequentially on a conductive substrate i) a photoconductive layer comprised of an amorphous material composed chiefly of silicon atoms and ii) a surface layer comprised of an amorphous material composed chiefly of carbon atoms and containing hydrogen atoms. The process has the steps of forming the photoconductive layer in a first reactor, and forming the surface layer in a second reactor. This process can produce an electrophotographic photosensitive member having an a-Si photoconductive layer and a-C:H surface layer or a-C:H(Si) surface layer in a good efficiency and at a low cost. Also disclosed is an electrophotographic photosensitive member manufacturing apparatus which carries out the process.