The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2004
Filed:
Jul. 17, 2002
Applicant:
Inventors:
Ilya Grodnensky, Foster City, CA (US);
Kyoichi Suwa, Tokyo, JP;
Kazuo Ushida, Tokyo, JP;
Eric R. Johnson, Los Gatos, CA (US);
Assignee:
Other;
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/732 ; G03B 2/768 ; G03B 2/742 ;
U.S. Cl.
CPC ...
G03B 2/732 ; G03B 2/768 ; G03B 2/742 ;
Abstract
Apparatus for performing measurement of a dimension of a test marked formed by overlapping feature imaged onto a an image forming layer of a semiconductor wafer and the calculation of the critical dimensions of the features from test mark. This is used in semiconductor processing. Also included is software configured to program a measurement device to perform the measurement and calculation of the dimension of a test mark.