The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2004
Filed:
Feb. 27, 2002
Yukihiro Tonomura, Kusatsu, JP;
NEC Machinery Corporation, Shiga-ken, JP;
Abstract
A method for diagnosing a fabrication machine for a semiconductor device, in which damage condition of components for fast driving can be recognized and failure of the components can be predicted, and the machine are provided. Vibration information of a drive member is sent from a motor controller for controlling a motor connected to the drive member to a machine controller. The vibration information is stored in an information storage in the machine controller and operated in an operational processor, and condition of the drive member according to the operation results is displayed on a display unit at any time. Therefore, when some failure occurs in the drive member, the specifics can be known with the display unit without need for connecting a special analyzer or PC to the fabrication machine for a semiconductor device. Consequently, the machine is capable for self-diagnosing, and thus trouble of the drive member can be prevented from happening.