The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2004
Filed:
Feb. 20, 2002
Applicant:
Inventors:
Sabine Steck, Bad Säckingen, DE;
Martin Schrems, Eggersdorf, AT;
Assignee:
Infineon Technologies AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/18242 ;
U.S. Cl.
CPC ...
H01L 2/18242 ;
Abstract
A method for forming a trench with a buried plate includes the steps of forming a trench in a substrate, depositing a non-doped silicate oxide in the trench and placing a doped silicate glass filling thereon. A buried trench plate is formed around the lower region of the trench in the substrate.