Semiconductor wafer manufacturing execution system with recipe distribution management database

Abstract

A semiconductor manufacturing execution system (MES) is disclosed, including a memory module, a comparing module, and an outputting module. The memory module stores a basic database and a recipe distribution management (RDM) database. The basic database includes multiple basic records, and the RDM database includes multiple RDM records. The comparing module compares operation data, received from a manufacturing machine, to each of the RDM records, and secondarily to each of the basic records, to determine whether the operation data matches at least one of the RDM and basic records. The outputting module outputs a limiting signal to the manufacturing machine if the operation data matches at least one of the RDM records. The limiting signal prevents the manufacturing machine from executing a process corresponding to the operation data. The outputting module may also output a first alarm signal to the manufacturing machine, and a second alarm signal to the user interface, if the operation data does not match at least one of the RDM and basic records. The semiconductor MES may also embody methods for adding new RDM records to the RDM database, editing RDM records in the RDM database, and/or deleting RDM records from the RDM database.