The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2004
Filed:
Aug. 24, 1998
Applicant:
Inventors:
Jick Yu, Beaverton, OR (US);
Chi Hing Choi, Portland, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 ; B05D 3/04 ; C23C 1/434 ;
U.S. Cl.
CPC ...
H05H 1/24 ; B05D 3/04 ; C23C 1/434 ;
Abstract
A method is described involving depositing a dielectric layer. The surface of the dielectric layer is modified to prevent outdiffusion from the dielectric layer. A metal layer is deposited above the modified surface of the dielectric layer.