The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2004
Filed:
Apr. 12, 2002
Eric Chu, Hsin-Chu, TW;
Kevin Chiang, Hsin-Chu, TW;
Ling-Hsin Tseng, Hsin-Pu Chen, TW;
Ken Yew, Hsin-Chu, TW;
United Microelectronics Corp., Hsin-Chu, TW;
Abstract
The present invention relates to a cooling system of a furnace, and more particularly, to a multi-cycle cooling system, located by the furnace door. The multi-cycle cooling system comprises the first gas cooling cycle, the second gas cooling cycle, the first liquid cooling cycle, the second liquid cooling cycle, the heat sinks and the heat insulation slot. When inside the process tube proceeds the high temperature process like depositing process, the first gas cooling cycle and the second gas cooling cycle are opened and the second liquid cooling cycle is closed at the same time. The second gas cooling cycle and the second liquid cooling cycle are assembled in the first flange, which is located on the process tube and contacts with the door. The first liquid cooling cycle in the second flange, which is located on the process tube and contacts with the first range, is always opened. When inside the process tube not proceeds the high temperature process, the first gas cooling cycle and the second gas cooling cycle are closed and the second liquid cycle is opened at the same time. The heat sinks and the heat insulation slot are on the door to increase the heat conduction efficiency of the door and to extend the lifetime of the elements on the door. The first liquid cooling cycle and the second cooling cycle are the independent cooling systems to each other. The first flange is located between the door and the second flange.