The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2004
Filed:
Jul. 24, 2001
Ming-Rong Fu, Taoyuan Hsien, TW;
Rex Lin, Taoyuan Hsien, TW;
Nai-Tien Ou, Hsinchu, TW;
Constance Chu, Hsinchu, TW;
Jiun-Shian Shiau, Kaoshiung Hsien, TW;
Ying-Wei Hsu, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-chu, TW;
Abstract
A recipe comparison system having recipe management ability in both offline accessing and online operating modes. The recipe comparison system includes an equipment server, an analysis module, and a recipe management module. The equipment server receives an upload signal, and then sends a recipe to the analysis module based on the upload signal. Then, the analysis module parses the recipe into internal-format-data according to a parsing rule, and outputs the internal-format-data to the recipe management module. If the recipe comparison system is in offline accessing mode, the recipe management module checks whether the internal-format-data obeys a specification definition. If the recipe comparison system is in the online operating mode, the recipe management module compares the internal-format-data with a standard recipe stored in a storage module.