The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2004
Filed:
Mar. 04, 2002
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
A method for measuring two-dimensional displacement using conjugate optics comprises the steps of emitting an incident beam onto a diffraction element to generate many firstly diffracted beams, selecting two axially symmetric beams of the same order of diffraction from the firstly diffracted beams, introducing corresponding sets of wavefront reconstruction optics to reflect the two selected beams back onto the same incident spot along the same optical paths and to generate many secondly diffracted beams, selecting two axially symmetric pairs of beams of the same order of diffraction from the secondly diffracted beams, forming two interference fringes by superposing the two selected pairs of beams via corresponding mirrors and interferometric optics, and obtaining two linearly independent displacements of the diffraction element relative to the rest of the optics by decoding the two interference fringes.