The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2004
Filed:
Dec. 05, 2001
Masaki Mizuochi, Hitachinaka, JP;
Yoshimasa Fukushima, Hitachinaka, JP;
Mitsuru Inoue, Utsunomiya, JP;
Other;
Abstract
An evacuation use sample chamber is constituted by a top table which is provided with a recessed portion disposed in a sample chamber main body and for mounting a sample and a groove portion surrounding the recessed portion; a stage which holds the top table and is displaceable in front and back, right and left and up and down directions together with the top table ; a sample chamber cover which covers above the sample chamber main body including the top table ; and an evacuation use pipe C which communicates with the groove portion and evacuates gas between the bottom face of the sample chamber cover and the top face of the top table including the sample . Thereby, an evacuation use sample chamber which performs a stable evacuation and keeps around a sample at a predetermined high vacuum and a circuit pattern forming apparatus which permits a highly accurate pattern drawing over the entire region of the sample are provided.