The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2004
Filed:
Jan. 29, 2002
Applicant:
Inventor:
Salman M. Kassir, San Luis Obispo, CA (US);
Assignee:
Strasbaugh, San Luis Obispo, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1304 ;
U.S. Cl.
CPC ...
H01L 2/1304 ;
Abstract
A method of relieving surface stress on a thin wafer by removing a small portion of the wafer substrate, the substrate being removed by applying a solution of KOH to the wafer while the wafer spins.