The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2004
Filed:
Nov. 21, 2001
Applicant:
Inventors:
Johannes Cornelis Driessen, Eindhoven, NL;
Hermanus Mathias Joannes Rene Soemers, Mierlo, NL;
Michael Jozefa Mathijs Renkens, Sittard, NL;
Theodorus Hubertus Josephus Bisschops, Eindhoven, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Valkenswaard, NL;
Antonius Maria Rijken, Nuenen, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/720 ;
U.S. Cl.
CPC ...
H01J 3/720 ;
Abstract
A lithographic projection apparatus includes conduits which supply utilities to components in a vacuum chamber such as object tables and/or associated motors and/or sensors. The conduits are shielded from exposure to the vacuum by conduit conducts having at least the same number of degrees of freedom as their associated object table.