The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2004
Filed:
Mar. 28, 2002
Applicant:
Inventors:
Andreas Kloeppel, Glauburg, DE;
Christoph Daube, Alzenau, DE;
Johannes Stollenwerk, Gelnhausen, DE;
Thomas Linz, Bühl, DE;
Assignee:
Unaxis Deutschland GmbH, Alzenau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ; B23K 1/500 ;
U.S. Cl.
CPC ...
C23C 1/434 ; B23K 1/500 ;
Abstract
Sparking is suppressed during high-frequency sputtering by a high-frequency generator ( ) which has a controlled switching unit ( ) that is connected upstream in relation to the output of the generator. A high-frequency supply signal that is generated at the output of the high-frequency generator is stopped for plasma discharge (PL) for a short time, by the switching unit.