The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2004
Filed:
Mar. 26, 2002
Applicant:
Inventors:
Takayuki Kubo, Tokyo, JP;
Hiroshi Asano, Tokyo, JP;
Fumio Kawahigashi, Tokyo, JP;
Akira Tsujino, Tokyo, JP;
Assignee:
Sumitomo Mitsubishi Silicon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 3/500 ;
U.S. Cl.
CPC ...
C30B 3/500 ;
Abstract
In a high rate pulling with a cooler surrounding a single crystal steam explosion by leakage from the cooler is prevented. Flow rates La, Lb of cooling water are measured by flowmeters on a cooling water inflow side and cooling water outflow side of the cooler When flow rate difference &Dgr;L (La−Lb) determined from the flow rates La, Lb exceeds 20 cc/minute, open/close valves are operated to stop water supply to the cooler and drain outward the cooing water in the cooler