The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2004
Filed:
Jun. 06, 2002
Applicant:
Inventors:
Hans-Stephan Albrecht, Göttingen, DE;
Matthias Kramer, Göttingen, DE;
Marcus Serwazi, Gleichen, DE;
Thomas Schroeder, Göttingen, DE;
Stefan Niedermeier, Albertshofen, DE;
Assignee:
Lambda Physik AG, Goettingen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/10 ; H01S 3/22 ;
U.S. Cl.
CPC ...
H01S 3/10 ; H01S 3/22 ;
Abstract
A wavelength chirp compensation method for an excimer or molecular fluorine laser system operating in burst mode, includes pre-programming into a computer of the laser system resonator tuning optic adjustments for making the adjustments during pauses between bursts to compensate wavelength chirp at beginnings of succeeding bursts.