The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2004
Filed:
Aug. 30, 2002
Applicant:
Inventors:
Masakatu Saijyo, Tokyo, JP;
Yoshimi Nakamura, Tokyo, JP;
Junichi Matsumoto, Tokyo, JP;
Toshiaki Kato, Tokyo, JP;
Shigeru Katakura, Tokyo, JP;
Assignee:
Oki Electric Industry Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract
A substrate for a probe card for use in testing semiconductor IC devices in a lump includes tester power supply terminals which receive a power supply voltage output from a tester. Power supply terminals are connected to a semiconductor IC device to be tested. At least two power supply layers each connect one of the tester power supply terminals to the power supply terminals.