The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2004
Filed:
Feb. 14, 2003
United Microelectronics Corp., Hsin-Chu, TW;
Abstract
A method of preparing a test sample for electron microscopy analysis is disclosed. First, a chip segment is attached to a holder of a sample polisher, and a first polishing end of the chip segment is polished by using the sample polisher to generate a first polished cross section. Thereafter, the chip segment is detached from the holder. Further, a carrier segment is attached to the first cross section of the chip segment and the conjoined carrier segment and the chip segment are attached to a pad segment so as to form a stacked structure. Finally, the stacked structure is attached to the holder, and a second polishing end of the chip segment is polished to generate a second polished cross section.