The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2004
Filed:
Nov. 06, 2002
Applicant:
Inventors:
Kishio Hidaka, Hitachiota, JP;
Yoshimichi Numata, Mito, JP;
Mitsuo Hayashibara, Hitachinaka, JP;
Mitsutoshi Honda, Hitachi, JP;
Takashi Naitou, Mito, JP;
Hideyo Komada, Hitachinaka, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/7082 ; H01L 2/7102 ; H01L 2/970 ; H01L 3/111 ;
U.S. Cl.
CPC ...
H01L 2/7082 ; H01L 2/7102 ; H01L 2/970 ; H01L 3/111 ;
Abstract
An electrode device for an electric field emission electron source suitable for duty drive having an element size of 50 &mgr;m or smaller and an electrode device fabricating method. A glass film used as catalyst of forming carbon nanotubes is formed on a substrate to form metal catalyst at nano meter level and control dispersion. Carbon nanotubes are dispersively formed on the metal catalyst and a metal coat is formed on the surface of carbon nanotubes to improve electric pulse response characteristics.