The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2004
Filed:
Jul. 15, 2002
Yaw-Wen Wu, Tainan, TW;
Tung-Gan Cheng, Tainan, TW;
Tung-Liang Wua, Hsin-Chu, TW;
Cheng-Chao Lin, Chia-Yi, TW;
Hsueh-Cheng Lin, Hsin Chu, TW;
Chia-Fu Tsai, Tainan, TW;
Chih-Jung Yeh, Kaohsiung, TW;
Hung-Tse Huang, Yung-Kang, TW;
Ray-Wen Tsai, Yun-Lin, TW;
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin Chu, TW;
Abstract
An apparatus and method for adjusting the position of a load port utilized in a semiconductor wafer processing system. Generally, a door opener can be configured for opening a door through which a semiconductor wafer may enter for subsequent positioning and processing thereof by a semiconductor wafer processing system. A load port is associated with the door opener. A calibration mechanism can then be utilized for calibrating the load port for leveling and height positioning, such that a plurality of directional axis associated with the load port do not interfere with one another, thereby conserving calibration time while permitting a single individual to perform calibration operations thereof.