The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2004
Filed:
Jul. 16, 2002
Abstract
The invention provides a charged particle device ( ) comprising: a particle source ( ) for providing a charged particle beam ( ), and objective lens ( ) for directing the particle beam onto a specimen ( ), said objective lens ( ) having an optical axis ( ); a particle mirror ( ) located on the optical axis ( ) of the objective lens ( ), said particle mirror having a front surface, a back surface, a drift region ( ) reaching from the back surface to the front surface for letting the charged particle beam pass from the back surface to the front surface, said drift region ( ) being positioned away from the optical axis ( ), and a deflecting region located on the front surface for deflecting charge particles coming from the specimen towards a detector ( ).