The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2004
Filed:
Feb. 12, 2001
Applicant:
Inventors:
Daniel J. C. Herr, Chapel Hill, NC (US);
David Charles Joy, Knoxville, TN (US);
Assignee:
University of Tennessee Research Foundation, Knoxville, TN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03H 1/22 ; H01L 2/166 ;
U.S. Cl.
CPC ...
G03H 1/22 ; H01L 2/166 ;
Abstract
A method for patterning a layer on a substrate can include projecting coherent radiation toward a reflector surface so that the coherent radiation is reflected off the reflector surface to provide a holographic projection of a desired image wherein the reflector surface includes information that corresponds to an inverse of the holographic projection of the desired image. The substrate including the layer can be maintained in the path of the reflected radiation so that the holographic projection is projected onto the layer. Related systems are also discussed.