The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2004
Filed:
Jan. 22, 2002
Joseph Yudovsky, Campbell, CA (US);
Salvador P. Umotoy, Antioch, CA (US);
Shamouil Shamouilian, San Jose, CA (US);
Ron Rose, San Jose, CA (US);
Rita Dukes, San Jose, CA (US);
Xiaoxiong Yuan, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support assembly for supporting a substrate during processing is provided. In one embodiment, a support assembly includes a ceramic body having an embedded heating element and a base plate. The base plate and the ceramic body define a channel therebetween adapted to supply purge gas to a perimeter of a substrate disposed on the support assembly. The base plate is fastened to the body by brazing, adhering, fastening, press fitting or by mating engaging portions of a retention device such as a bayonet fitting.