The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2004
Filed:
Jun. 27, 2001
Applicant:
Inventors:
Mark Erickson, Sunnyvale, CA (US);
Thorkell Gudmundsson, San Jose, CA (US);
Sunil C. Shah, Los Altos, CA (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 1/302 ;
U.S. Cl.
CPC ...
G05B 1/302 ;
Abstract
The present invention includes a method and system for limiting the ramp rate of a variable under control in order to control stress in a process or plant under control. The present invention takes a limit curve provided by the user and combines that limit curve with a scale factor curve obtained from a model of the system to produce an allowable limit curve. A ramp rate limiter then uses the allowable limit curve to control the ramp rate of the variable under control such that the ramp rate of the variable under control is able to achieve the maximum allowable limit but no more.