The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2004
Filed:
Jan. 04, 2002
Hoi Cheong Sun, Dayton, NJ (US);
Nitin V. Desai, Princeton Junction, NJ (US);
William R. Roach, Rocky Hill, NJ (US);
David Norman Ludington, Newtown, PA (US);
Timothy Allen Pletcher, Eastampton, NJ (US);
David Keller, Newtown, PA (US);
Frank B. Lang, Princeton, NJ (US);
Peter D. Southgate, Monmouth Junction, NJ (US);
Joseph T. McGinn, Flemington, NJ (US);
Delsys Pharmaceutical Corporation, Monmouth Junction, NJ (US);
Abstract
Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (E ) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.