The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2004
Filed:
Sep. 12, 2001
Applicant:
Inventors:
Shun-An Chen, Kaohsiung, TW;
Li-Chung Lin, Pingtung Hsien, TW;
Yao-Tung Liu, Tainan, TW;
Yung-Min Cheng, Yung-Kang, TW;
Ming-Hui Lin, Kaohsiung, TW;
Hsin-Hom Chen, Taipei Hsien, TW;
Chun-Sheng Wang, Tainan, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., LTD, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/126 ;
U.S. Cl.
CPC ...
G01R 3/126 ;
Abstract
A system for monitoring semiconductor testing tools comprises a tester testing a semiconductor device, whereby a test result is derived, a storage device storing a logic function corresponding to the semiconductor device, and a processor receiving the test result and the logic function from the tester and storage device respectively, and applying the logic function to the test result for validation.