The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2004
Filed:
Jul. 10, 2001
Yoshitaka Doi, Kanagawa, JP;
Masao Nomoto, Kanagawa, JP;
Kazuaki Hayashi, Gunma, JP;
Masahiro Izutsu, Kanagawa, JP;
Yoshiharu Kageyama, Saitama, JP;
Kyoichi Okamoto, Kanagawa, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present invention relates to an electron beam-irradiating reaction apparatus for irradiating a desired object to be treated, such as an exhaust gas, with an electron beam. Conventionally, a scanning tube of an electron beam irradiation device and a reaction device-for receiving the electron beam are rigidly connected. Therefore, excessive stress is applied to a connecting portion between the scanning tube and the reaction device and not only leakage of gas from the connecting portion, but also breakage of a metal window foil provided at an end portion of the scanning tube are likely to occur. In the present invention, to solve such problems, a flexible hermetic sealing member is provided between a portion around the end portion of the scanning tube and a peripheral edge of an electron beam receiving window in a side wall of an electron beam reaction device