The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2004
Filed:
Mar. 15, 2002
Applicant:
Inventor:
Lawrence J. Myland, West Chester, PA (US);
Assignee:
Akrion, LLC, Allentown, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B 2/100 ;
U.S. Cl.
CPC ...
F26B 2/100 ;
Abstract
Drying semiconductor wafers or substrates by introducing an polar organic compound in liquid form into or onto means for enhancing evaporation within a process chamber and allowing the liquid to evaporate and form a drying vapor within the process chamber.
Myland, Lawrence. (2004). Drying vapor generation (U.S. Patent No. 6722056). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6722056
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile