The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2004
Filed:
Feb. 27, 2002
Applicant:
Inventor:
Matthew S. Ryskoski, Kyle, TX (US);
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 1/900 ;
U.S. Cl.
CPC ...
G06F 1/900 ;
Abstract
A method for controlling a process includes processing a first workpiece in a first process tool. An output characteristic of the first workpiece is measured. A second workpiece is processed in the first process tool. A tool health metric is determined for the first process tool corresponding to the processing of the second workpiece. A control action is determined based on the measured output characteristic and the tool health metric.