The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2004
Filed:
Sep. 12, 2000
Applicant:
Inventor:
Takashi Akahori, Hachioji, JP;
Assignee:
Tokyo Electron Limited, Tokyo-to, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/13213 ; H01L 2/348 ; H01L 2/1306 ;
U.S. Cl.
CPC ...
H01L 2/13213 ; H01L 2/348 ; H01L 2/1306 ;
Abstract
Insulating films through of CF films (fluorine-contained carbon films) are formed on a substrate (not shown). In addition, Cu wiring layers and are formed on the CF films and via an adhesion layer which comprises a Ti layer and a TiC layer. By forming the insulating films through of CF films, Cu in the wiring layers is prevented from diffusing into the insulating films through . The relative dielectric constant of the CF film is smaller than the relative dielectric constant of a BCB film.