The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2004
Filed:
Nov. 30, 2001
Teruo Iwata, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The valve includes a valve main body having an opening A and forming a space which creates a part of a gas flow path, a first valve member , provided in the valve main body, for opening/closing the opening A, and a drive mechanism for moving the first valve member between a close position where the opening A is closed and an open position where the opening A is opened, wherein the drive mechanism has a rod to be reciprocated, an end of the rod extends into the valve main body through a through hole B formed in the valve main body to be connected to the first valve member , the first valve member is moved between the close position and the open position as the rod is driven reciprocated, and the valve further comprising a sealing mechanism , which communicates into the valve main body via the through hole B, for isolating the drive mechanism side air-tightly from the valve main body, and a second valve member , provided on the rod to move together with the rod as it is reciprocated, which closes the through hole B when the first valve member is situated at the open or close position so as to isolate the sealing mechanism with respect to the valve main body