The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Sep. 17, 2001
Applicant:
Inventors:
Stacy Firth, Salt Lake City, UT (US);
W. Jarrett Campbell, Cary, NC (US);
Assignee:
Yield Dynamics, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/900 ; H01L 2/100 ;
U.S. Cl.
CPC ...
G06F 1/900 ; H01L 2/100 ;
Abstract
A system and method for estimating errors within a semiconductor fabrication process. The system identifies an optimal number of error components based upon relevant context items. The system further estimates the error within the fabrication process and attributes portions of the error to each of the identified error components based upon feedback data received from the manufacturing process.