The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Nov. 29, 2001
Chung-Hsin Chen, Hsinchu, TW;
Windbond Electronics Corporation, Hsinchu, TW;
Abstract
A method and system of monitoring apparatuses of manufacturing integrated circuit (IC) detects the problems during wafers processing by replaying the apparatus events. First, the method and system download the data of apparatus events, and then calculate the achievement indices. Then, the method and system establish the control chart to determined limitative rules, and execute the replaying system by establishing the computer interface system therewith to detect the abnormal point so as to proceed a rectification. The method and system of monitoring apparatuses of manufacturing IC review the past achievements by establishing a model for replaying apparatus history and achievements, and foresee the future problems by establishing control charts and a knowledge archive of rules.