The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2004

Filed:

Dec. 10, 2001
Applicant:
Inventors:

Robert M. Lex, Guilford, CT (US);

Andrew Eric Carlson, Middletown, CT (US);

Michael Metz, Yorktown Heights, NJ (US);

Assignee:

Zygo Corporation, Middlefield, CT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 ;
U.S. Cl.
CPC ...
G01B 9/02 ;
Abstract

A monolithic corrector plate for an interferometer, includes a substrate having an input face for intercepting a first beam emitted by the interferometer, and an output face opposite the input face. An aperture integral with the substrate is configured to transform a first beam intercepted by the input face into a second beam emerging from the output face.


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