The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Jun. 21, 2001
Applicant:
Inventors:
Kazunori Iwamoto, Utsunomiya, JP;
Hideki Nogawa, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/758 ; G03B 2/762 ;
U.S. Cl.
CPC ...
G03B 2/758 ; G03B 2/762 ;
Abstract
A moving mechanism includes a reference structure having a guide surface, a movable portion being movable along the guide surface, and an actuator having movable elements, provided at opposite end portions of the stage, and at least two stators. The stators are separated from each other and each is movable in two-dimensional directions by a reaction force produced as the movable portion is driven.
Iwamoto, Kazunori. (2004). Moving mechanism in exposure apparatus, and exposure apparatus having the same (U.S. Patent No. 6717653). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6717653
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile