The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2004

Filed:

Jun. 17, 2002
Applicant:
Inventors:

Michael A. Chiu, Somerville, MA (US);

Neil R. Bentley, Westborough, MA (US);

Assignee:

Teradyne, Inc., Boston, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract

A semiconductor test system that includes a tester, a material handling unit and a manipulator that positions the tester relative to the material handling unit. The manipulator is in the form of a cart that can be wheeled to the material handling unit. The cart is attached to the mateiral handling unit to provide course positioning of the tester relative to the handling unit. Major motion of the test head is constrained to an axis perpendicular to the mating interface of the material handling unit. However, compliant motion, with up to six degrees of freedom, is possible in a complaint zone near the handler. In this way, alignment units on the tester and material handling unit can accurately control the final positioning of the tester relative to the material handling unit.


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