The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Jun. 21, 2002
Edward D. Heller, Bedford, MA (US);
Varian Semiconductr EquipmentAssociates, Inc., Gloucester, MA (US);
Abstract
An electrical switch includes a tubular housing constructed substantially of a non-conductive material, a first electrical contact positioned at one end of the housing, a second electrical contact positioned at a second end of the housing, and a shuttle selectively displaceable within the housing between the first electrical contact and the second electrical contact. The shuttle is electrically connected to the first electrical contact. A spring mechanism positioned within the housing and connected to the shuttle biases the shuttle into a first position proximate the first electrical contact. The shuttle is displaceable into engagement with the second electrical contact by pressurized gas to establish an electrical connection between the first electrical contact and the second electrical contact. The disclosed switch may be employed to selectively ground the components of an ion implantation system and is particularly suitable for use in high-voltage environments.