The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Aug. 09, 2002
Eric Lahaug, Meridian, ID (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
Methods of forming dual gate oxides are provided. A first gate oxide layer and oxynitride layer is formed over a substrate. A portion of the first gate oxide and oxynitride layers is removed over a second area of the substrate, and a second gate oxide is formed thereon. The first gate oxide layer is simultaneously reoxidized. The reoxidized first gate oxide layer incorporates oxynitride and is thinner than a second gate oxide layer. Methods of forming the semiconductor devices and memory cells are also provided. It is emphasized that this abstract is provided to comply with the rules requiring an abstract which will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that is will not be used to interpret or limit the scope or meaning of the claims.