The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Apr. 01, 2002
Won-Joo Kim, Boise, ID (US);
Robert J. Hanson, Boise, ID (US);
David H. Chun, Boise, ID (US);
Gary A. Evans, Eagle, ID (US);
Seungwoo Lee, Boise, ID (US);
Jim J. Browning, Boise, ID (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
A multi-layered structure, and method for producing same, which may include at least one glass layer anodically bonded to an intermediate layer. The intermediate layer may function as an anodic bonding layer, an etch stop layer, and/or a hard mask layer. A template may be formed of the multi-layered structure by forming a desired pattern of openings therein by way of, for example, etching. Such a template may, for example, be used in the alignment and adherence of spacer structures to an electrode plate during the fabrication of flat panel displays. When used in this context, the construction of such a template results in more precise control of the patterning and sizing of the holes formed therein which thereby allows for more precise placement of spacer structures as well as the use of spacer structures exhibiting relatively higher aspect ratios during the fabrication of flat panel displays.