The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2004
Filed:
Sep. 03, 2002
Applicant:
Inventors:
Christopher James Evans, Higganum, CT (US);
Michael Küchel, Oberkochen, DE;
Assignee:
Zygo Corporation, Middlefield, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 ;
U.S. Cl.
CPC ...
G01B 9/02 ;
Abstract
Interferometric apparatus and methods by which aspheric surfaces and wavefronts may be precisely measured. The apparatus is provided with two modes of operation. In one mode, the apparatus is configured generally as a Fizeau interferometer in which an aspheric reference surface is used to permit the rapid, robust measurement of the difference between the aspheric reference surface and an aspheric test optic or wavefront. In another mode of operation, the aspheric test surface itself is completely characterized through in-situ use of an interferometric scanning technique using a spherical reference surface.