The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2004
Filed:
Oct. 23, 2001
Kunio Otsuki, Kyoto, JP;
Yutaka Saijo, Kyoto, JP;
Horiba, Ltd., Kyoto, JP;
Abstract
A spectral ellipsometer includes a light incident optical system for focusing a incidence spot of polarized light of multi-wavelengths onto a sample surface. A detecting optical system receives the reflected light influenced by the sample surface so that the amount of change in an elliptical polarization will be characteristic of the sample surface. A spherical prism polarizer is employed in the light incident optical system having complimentary curved light incident and light exit surfaces to enable the focusing of the incident light so that each of the ray traces of the range of wavelengths are focused at the same position on the sample surface.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile