The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2004
Filed:
Aug. 15, 2002
Applicant:
Inventors:
Gary Peter Widdowson, Hong Kong, CN;
You Yong Liao, Singapore, SG;
Gang Ou, Singapore, SG;
Ajit S. Gaunekar, Singapore, SG;
Assignee:
ASM Technology Singapore PTE Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02K 4/100 ;
U.S. Cl.
CPC ...
H02K 4/100 ;
Abstract
The invention provides a motor system and a method for positioning a load. The system comprises support means such as an XY table for supporting the load. A first motor and a second motor cooperate to drive the load, whereby the first motor is adapted to provide higher thrust than the second motor and the second motor is adapted to deliver higher positioning accuracy than the first motor during a positioning sequence to position the load.