The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2004
Filed:
Mar. 09, 1999
Ron Hershel, Corvalis, WA (US);
Rich Campbell, Chandler, AZ (US);
Timothy S. Killeen, Redmond, WA (US);
Donald B. Snow, Mercer Island, WA (US);
Applied Precision LLC, Issaquah, WA (US);
Abstract
A probe card inspection system uses a fiduciary plate having a plurality of targets deposited thereon by photolithography and vapor deposition. A plurality of semiconductor probe card probe tips are contacted with the fiducial pattern on the plate. An electronic imaging system determines the position of geometric centroids of the probe tips with respect to an index mark in the fiducial pattern. A central processor determines the position of each imaged probe tip(s) with respect to the index mark, and calculates the relative positions of each probe tip from that data.