The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2004
Filed:
Feb. 26, 2002
Masami Terauchi, Miyagi, JP;
JEOL Ltd., Tokyo, JP;
Abstract
An electron microscope is offered which is fitted with an X-ray spectrometer having a compact optical system and high resolution. The spectrometer has a spectrometer chamber whose inside is evacuated by a vacuum pumping system. A diffraction grating having unequally spaced grooves is placed in the chamber. An X-ray detector is mounted to an end of the chamber. The X-ray spectrometer is mounted to the sidewall of the electron microscope via a gate valve. A specimen is irradiated with an electron beam and emits characteristic X-rays, which are made to impinge on the face of the grating at a large angle with respect to the normal line to the face. Diffracted X-rays from the grating reach the X-ray detector and are detected.