Method of detecting an integrated circuit in failure among integrated circuits, apparatus of doing the same, and recording medium storing program for doing the same

Abstract

Detecting failed integrated circuit among integrated circuits by (a) assuming that all integrated circuits under test define under-test set, and testing each one of the integrated circuits in under-test set, (b) removing integrated circuits judged to be in failure in step (a) from the under-test set, (c) measuring spectrum of a current supplied from power source into each one of integrated circuits in under-test set, (d) calculating both mean value and standard deviation of spectrum for under-test set, (e) judging whether an integrated circuit is in failure or not, based on both the mean value and the standard deviation of the spectrum, (f) removing integrated circuits having been judged to be in failure in step (e) from under-test set, and (g) judging under-test set to be in no failure. Thus, it is possible to find failed integrated circuits without preparing data of integrated circuit in no failure, as a reference.