The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2004
Filed:
Nov. 01, 2001
Applicant:
Inventors:
Masaki Mori, Shiga, JP;
Hiroyuki Nakagawa, Kyoto, JP;
Assignee:
Toray Engineering Company, Limited, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; G06K 1/906 ;
U.S. Cl.
CPC ...
G03B 2/742 ; G06K 1/906 ;
Abstract
A laser exposure apparatus including a laser oscillator ( ) for oscillating laser beam having a circular section, a beam expander ( ) for enlarging the laser beam oscillated from the laser oscillator, a square mask ( ) for shaping the laser beam having the circular section enlarged by the beam expander into a square section and an optical system for contracting the laser beam formed into the square section by the square mask. Even when a very small identification code is attached to a wafer, the identification code can be marked to improve reading recognizability of the identification code.