The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2004
Filed:
Jan. 03, 2000
Applicant:
Inventors:
Michael L. Miller, Cedar Park, TX (US);
Terrence J. Riley, Austin, TX (US);
Qingsu Wang, Austin, TX (US);
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 1/900 ; G06F 1/130 ;
U.S. Cl.
CPC ...
G06F 1/900 ; G06F 1/130 ;
Abstract
The present invention provides for a method and an apparatus for fault model analysis in manufacturing tools. A sequence of semiconductor devices is processed through a manufacturing process. Production data resulting from the processing of the semiconductor devices is acquired. A fault model analysis is performed using the acquired production data.