The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2004
Filed:
Oct. 12, 2000
Applicant:
Inventors:
Assignee:
Mitutoyo Corporation, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 ;
U.S. Cl.
CPC ...
G01B 9/02 ;
Abstract
An optical interferometric measuring instrument comprises a laser light source , an interferometer portion , a reflecting mirror , a bellows driving carriage , and a fixed portion . The bellows driving carriage moves together with a slider . A main bellows is disposed between the bellows driving carriage and the fixed portion . An auxiliary bellows is disposed between the reflecting mirror and the bellows driving carriage . An auxiliary bellows is disposed between the interferometer portion and the fixed portion . It is possible to avoid the variation of the laser wavelength ascribable to the change of the refractive index of air when the laser light passes through the air.