The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2004
Filed:
Mar. 13, 2003
Christopher Lyle Borst, Plano, TX (US);
Alwin J. Tsao, Garland, TX (US);
Bobby David Strong, Sachse, TX (US);
Noel Russell, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
Semiconductor devices and manufacturing methods therefor are disclosed, in which conductive fill structures are provided in fill regions in an interconnect wiring layer between conductive wiring structures to facilitate planarization uniformity during metalization processing. One approach employs fill structures of varying sizes where smaller fill structures are formed near wiring regions having high aspect ratio wiring structures and larger fill structures are located near wiring regions with lower aspect ratio wiring structures. Another approach provides fill structures with varying amounts of openings, with fill structures having few or no openings being provided near low aspect ratio wiring structures and fill structures having more openings being located near higher aspect ratio wiring structures.