The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2004
Filed:
Oct. 26, 2001
Applicant:
Inventors:
John L. Edwards, Jr., Phoenix, AZ (US);
Yi Wei, Chandler, AZ (US);
Dirk C. Jordan, Gilbert, AZ (US);
Xiaoming Hu, Chandler, AZ (US);
James Bradley Craigo, Tempe, AZ (US);
Ravindranath Droopad, Chandler, AZ (US);
Zhiyi Yu, Gilbert, AZ (US);
Alexander A. Demkov, Phoenix, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/120 ; H01L 2/136 ; H01L 2/1302 ; H01L 2/1461 ;
U.S. Cl.
CPC ...
H01L 2/120 ; H01L 2/136 ; H01L 2/1302 ; H01L 2/1461 ;
Abstract
A method of removing an amorphous oxide from a surface of a monocrystalline substrate is provided. The method includes depositing a passivation material overlying the amorphous oxide. The monocrystalline substrate is then heated so that the amorphous oxide layer decomposes into at least one volatile species that is liberated from the surface.