The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2004
Filed:
Apr. 04, 2003
Applicant:
Inventors:
Mohammed Fazil Fayaz, Pleasantville, NY (US);
Haining Yang, Wappingers Falls, NY (US);
Uwe Kerst, Berlin, DE;
Joseph J. Mezzapelle, Wappingers Falls, NY (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/120 ; H01L 2/708 ;
U.S. Cl.
CPC ...
H01L 2/120 ; H01L 2/708 ;
Abstract
A MIM capacitor includes a bottom plate, a capacitor dielectric disposed over the bottom plate, and a top plate disposed over the capacitor dielectric. An etch stop material is disposed over the top plate, and the top plate has a width that is less than the width of the etch stop material width. The top plate edges may be pulled back during the removal of the resist used to pattern the top plate, by the addition of chemistries in the resist etch that are adapted to pull-back or undercut the top plate edges beneath the etch stop material.